Publications

Journal Publications

B. Edamana, Y.Chen, D. Slavin, E. E. Aktakka, K. R. Oldham, “Estimation with threshold sensing for gyroscope calibration using a piezoelectric microstage,” IEEE Trans. Control Systems Technology, vol. 23, pp. 1943-1951, 2015. [PDF]

E. E. Aktakka, J.-K. Woo, D. Egert, R. Gordenker, K. Najafi, “A micro actuation and sensing platform with active lockdown for in situ calibration of scale factor drift in dual axis gyroscopes,” IEEE/ASME Transactions on Mechatronics, vol. 20, pp. 934-943, 2015. [PDF]

E. Aktakka, K. Najafi, “A micro inertial energy harvesting platform with self-supplied power management circuit for autonomous wireless sensor nodes,” IEEE Journal of Solid State Circuits, vol. 49, pp. 2017-2029, 2014. [PDF]

E. E. Aktakka, N. Ghafouri, C. E. Smith, R. L. Peterson, M. M. Hussain, K. Najafi, “Post CMOS FinFET integration of bismuth telluride and antimony telluride thin film based thermoelectric devices on SOI substrate,” IEEE Electron Device Letters, vol. 34, pp. 1334-1336, 2013. [PDF]

E. E. Aktakka, R. L. Peterson, K. Najafi, “High-stroke and high-deflection bulk-PZT diaphragm and cantilever micro actuators and effect of pre-stress on device performance” IEEE J. of Microelectromechanical Systems, vol. 23, pp. 438-451, 2014. [PDF]

E. E. Aktakka, R. L. Peterson, K. Najafi, “Wafer-level integration of high-quality bulk piezoelectric ceramics on silicon” IEEE Transactions on Electron Devices, vol. 60, pp. 2022-2030, 2013. [PDF]

T. Galchev, E. E. Aktakka, K. Najafi, “A piezoelectric parametric frequency increased generator for harvesting low frequency vibrations,” IEEE/ASME J. of Microelectromechanical Systems, vol. 21, pp. 1311-1320, 2012. [PDF]

E. E. Aktakka, H. Kim, K. Najafi, “Energy scavenging from insect flight” J. of Micromechanics and Microengineering, vol. 21, No.9, 095016, pp.1-11, 2011. [PDF]

Refereed Conference Proceedings

E. E. Aktakka, J.-K. Woo, K. Najafi, “On-chip characterization of scale factor of a MEMS gyroscope via a micro calibration platform,” Proc. 4th IEEE Int. Symposium on Inertial Sensors and Systems, Kauai, HI, Mar. 2017.

E. E. Aktakka, K. Najafi, “Multi-axis inertial energy harvester based on piezoelectric crab-legs with partitioned electrodes,” 16th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS’16), Paris, France, Dec. 2016. (Oral presentation) [PDF]

Y. Chen, E. E. Aktakka, J.-K. Woo, K. Oldham, “Threshold sensing signal construction from a capacitive sensor for MEMS gyroscope calibration,” IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), Banff, Alberta, Canada, pp. 999-1004, July 2016. (Oral presentation) [PDF]

E. E. Aktakka, K. Najafi, “A six-axis micro platform for in situ calibration of MEMS inertial sensors,” 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’16), Shanghai, China, pp. 243-246, Jan. 2016. (Oral presentation acceptance rate: 8%) [PDF]

E. E. Aktakka, K. Najafi, “Three-axis piezoelectric vibration energy harvester,” 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’15), Estoril, Portugal,  pp. 1141-1144,  Jan. 2015. (Poster presentation acceptance rate: 41%) [PDF]

I. Shahosseini, R. L. Peterson, E. E. Aktakka, K. Najafi, “Electromagnetic generator optimization for non-resonant energy harvester,” IEEE Sensors, Valencia, Spain, pp. 178-181, Nov. 2014. (Oral presentation acceptance rate: 33%) [PDF]

B. Edamana, D. Slavin, E. E. Aktakka, K. R. Oldham, “Control and estimation with threshold sensing for inertial measurement unit calibration using a piezoelectric microstage,” American Control Conference (ACC), Portland, OR, pp. 3686-3691, June 2014. (Oral presentation) [PDF]

E. E. Aktakka, J.-K. Woo, D. Egert, R. Gordenker, K. Najafi, “A micro vibratory stage for on chip physical stimulation and calibration of MEMS gyroscopes,” Proc. IEEE Int. Symposium on Inertial Sensors and Systems, Laguna Beach, CA, pp. 151-152, Feb. 2014. (Oral presentation) [PDF]

E. E. Aktakka, R. L. Peterson, K. Najafi, “A 6-DOF piezoelectric micro vibratory stage based on multi-axis distributed-electrode excitation of PZT/Si unimorph T-beams,” 17th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers’13), Barcelona, Spain, pp. 1583-1586, June 2013. (Oral presentation acceptance rate: 15%) [PDF]

E. E. Aktakka, R. L. Peterson, K. Najafi, “A 3-DOF piezoelectric micro vibratory stage based on bulk-PZT/Silicon crab-leg suspensions” 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’13), Taipei, Taiwan, pp. 576-579, Jan. 2013. (Poster presentation acceptance rate: 40%) [PDF]

E. E. Aktakka, C. E. Smith, N. Ghafouri, R. L. Peterson, M. M. Hussain, K. Najafi, “Heterogeneous integration of co-evaporated bismuth/antimony telluride thin films based thermoelectric harvesters on FinFET CMOS chip” 12th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Apps. (PowerMEMS’12), Atlanta,  GA, USA, pp. 97-100, Dec. 2012. (Oral presentation acceptance rate: 32%) [PDF]

E. E. Aktakka, R. L. Peterson, K. Najafi, “Wet-etching and uniform wafer-level thinning of bulk piezoelectric ceramics on silicon”, Solid- State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, SC, USA, pp. 256-257, June 2012. (Poster presentation, late news paper acceptance rate: 20%) [PDF]

E. E. Aktakka, R. L. Peterson, K. Najafi, “Multi-layer PZT stacking process for piezoelectric bimorph energy harvesters” 11th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion App. (PowerMEMS’11), Seoul, Rep. of Korea, pp. 139-142, Nov. 2011. (Oral presentation, acceptance rate: 37%) [PDF]

E. E. Aktakka, R. L. Peterson, K. Najafi, “Thinned PZT on SOI process and design optimization for piezoelectric inertial energy harvesting”, 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’11), Beijing, China, pp. 1649-1652, Jun. 2011. (Poster presentation, acceptance rate: 45%) [PDF]

K. Najafi, T. Galchev, E. E. Aktakka, R. L. Peterson, J. McCullagh, “Microsystems for energy harvesting”, 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’11), Beijing, China, pp. 1845-1850, Jun. 2011. (Invited oral presentation) [PDF]

E. E. Aktakka, R.L. Peterson, K. Najafi, “A self-supplied inertial piezoelectric energy harvester with power management IC”, IEEE International Solid-State Circuits Conference (ISSCC’11), San Francisco, CA, USA, pp. 120-121, Feb. 2011. (Oral presentation, acceptance rate: 31%) [PDF]

E. E. Aktakka, R.L. Peterson, K. Najafi, “A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon”, IEEE International Electron Devices Meeting (IEDM’10), San Francisco, CA, USA, pp. 31.5.1-31.5.4, Dec. 2010. (Oral presentation, acceptance rate: 36%) [PDF]

T. Galchev, J. McCullagh, E. E. Aktakka, R.L. Peterson, K. Najafi, “Energy harvesting from low frequency and arbitrary vibrations,” High Efficiency Energy Conversion, Energy Management, and Low Power Systems for Aerospace/Military Electronics Workshop, Redstone Arsenal, AL, USA, Sept. 2010.

T. Galchev, E. E. Aktakka, H. Kim, K. Najafi, “A piezoelectric frequency-increased power generator for scavenging low-frequency ambient vibration” in IEEE International Conf. on Micro Electro Mechanical Systems (MEMS’10), Hong Kong, PRC, pp. 1203-1206, Jan. 2010. (Poster presentation, acceptance rate: 34%)[PDF]

E. E. Aktakka, H. Kim, K. Najafi, “Wafer-level fabrication of high performance MEMS using bonded and thinned bulk piezoelectric substrates” 15th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’09), Denver, CO, USA, pp. 849-852, June 2009. (Oral presentation, acceptance rate: 17%) [PDF]

E. E. Aktakka, H. Kim, M. Atashbar, and K. Najafi, “Mechanical energy scavenging from flying insects,” Solid- State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2008), Hilton Head Island, SC, USA, pp. 382–383, June 2008. (Poster presentation, late news paper acceptance rate: 25%) [PDF]

E. Romero, T. Galchev, E. Aktakka, N. Ghafouri, H. Kim, M. Neuman, K. Najafi, and R. Warrington, “Micro energy scavengers,”Proceedings of the 2008 Int. Conference on Commercialization of Micro and Nano Systems (COMS 2008), Puerto Vallarta, Mexico, Sept. 2008. (Best Paper/Presentation Award) [PDF]

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